12Inch Heater | |
8 Inch Heater | |
6 Inch Heater |
所属分类:半导体炉体 > TEL > 12Inch Heater
简要描述:
Furnace Vendor | TEL(Tokyo Electron) |
Heater Model | VMM-56-306 |
Max Temperature | 900℃ |
Wafer Size | 12 Inch |
Process | LP-CVD |
Process Temp Range | 750℃ |
上一篇:VMM-56-304
下一篇:VMU-54-001