| 6 Inch Heater | |
| 8 Inch Heater | |
| 12Inch Heater |
所属分类:半导体炉体 > TEL > 12Inch Heater
简要描述:
| Furnace Vendor | TEL(Tokyo Electron) |
| Heater Model | VMM-56-306 |
| Max Temperature | 900℃ |
| Wafer Size | 12 Inch |
| Process | LP-CVD |
| Process Temp Range | 750℃ |
上一篇:VMM-56-304
下一篇:VMU-54-001