12Inch Heater | |
8 Inch Heater | |
6 Inch Heater |
所属分类:半导体炉体 > TEL > 6 Inch Heater
简要描述:
Furnace Vendor | TEL(Tokyo Electron) |
Heater Model | VMU-28-011 |
Max Temperature |
1200℃
|
Wafer Size | 6 Inch |
Process | Anneal |
Process Temp |
850-1200℃
|
上一篇:VMU-40-009
下一篇:VMM-28-014