| 6 Inch Heater | |
| 8 Inch Heater | |
| 12Inch Heater |
所属分类:半导体炉体 > TEL > 6 Inch Heater
简要描述:
| Furnace Vendor | TEL(Tokyo Electron) |
| Heater Model | VMU-28-011 |
| Max Temperature |
1200℃
|
| Wafer Size | 6 Inch |
| Process | Anneal |
| Process Temp |
850-1200℃
|
上一篇:VMU-40-009
下一篇:VMM-28-014