| 6 Inch Heater | |
| 8 Inch Heater | |
| 12Inch Heater |
所属分类:半导体炉体 > TEL > 6 Inch Heater
简要描述:
| Furnace Vendor | TEL(Tokyo Electron) |
| Heater Model | VMM-28-104 |
| Max Temperature | 1000℃ |
| Wafer Size | 6 Inch |
| Process | OXIDE |
| Process Temp Range | 850-1000℃ |
上一篇:VMM-28-101
下一篇:VMU-28-014