12Inch Heater | |
8 Inch Heater | |
6 Inch Heater |
所属分类:半导体炉体 > TEL > 6 Inch Heater
简要描述:
Furnace Vendor | TEL(Tokyo Electron) |
Heater Model | VMM-28-104 |
Max Temperature | 1000℃ |
Wafer Size | 6 Inch |
Process | OXIDE |
Process Temp Range | 850-1000℃ |
上一篇:VMM-28-101
下一篇:VMU-28-014