| 12Inch Heater | |
| 8 Inch Heater | |
| 6 Inch Heater |
所属分类:半导体炉体 > TEL > 12Inch Heater
简要描述:
| Furnace Vendor | TEL(Tokyo Electron) |
| Heater Model | VMU-54-001 |
| Max Temperature | 1200℃ |
| Wafer Size | 12 Inch |
| Process | OXIDE |
| Process Temp | 850~1200℃ |
上一篇:VMM-56-306
下一篇:VMM-56-302EX