| 6 Inch Heater | |
| 8 Inch Heater | |
| 12Inch Heater |
所属分类:半导体炉体 > TEL > 12Inch Heater
简要描述:
| Furnace Vendor | TEL(Tokyo Electron) |
| Heater Model | VMM-56-302EX |
| Max Temperature | 800℃ |
| Wafer Size | 12 Inch |
| Process | LPCVD-Nitride, POLY |
| Process Temp Range | 630℃ |
上一篇:VMU-54-001
下一篇:VOS-56-003