12Inch Heater | |
8 Inch Heater | |
6 Inch Heater |
所属分类:半导体炉体 > TEL > 6 Inch Heater
简要描述:
Furnace Vendor | TEL(Tokyo Electron) |
Heater Model | VMM-28-014 |
Max Temperature | 800℃ |
Wafer Size | 6 Inch |
Process | LPCVD |
Process Temp |
150-500℃
|
上一篇:VMU-28-011
下一篇:VMM-28-007