| 6 Inch Heater | |
| 8 Inch Heater | |
| 12Inch Heater |
所属分类:半导体炉体 > TEL > 8 Inch Heater
简要描述:
| Furnace Vendor | TEL(Tokyo Electron) |
| Heater Model |
VMU-40-009
|
| Max Temperature |
1200℃
|
| Wafer Size | 8 Inch |
| Process |
Oxidation
|
| Process Temp |
850-1200℃
|
上一篇:VMU-40-007EX2
下一篇:VMU-28-011