12Inch Heater | |
8 Inch Heater | |
6 Inch Heater |
所属分类:半导体炉体 > TEL > 8 Inch Heater
简要描述:
Furnace Vendor | TEL(Tokyo Electron) |
Heater Model |
VMU-40-009
|
Max Temperature |
1200℃
|
Wafer Size | 8 Inch |
Process |
Oxidation
|
Process Temp |
850-1200℃
|
上一篇:VMU-40-007EXT
下一篇:VMU-28-011