所属分类:半导体炉体 > Ultra high Temp > 6 Inch Heater
简要描述:
Furnace Vendor |
|
Heater Model |
-- |
Max Temperature |
2100℃ |
Wafer Size |
6 Inch |
Process |
Acivation Annealing |
Process Temp Range |
1200℃~1900℃ |