| 6 Inch Heater | |
| 8 Inch Heater | |
| 12Inch Heater |
所属分类:半导体炉体 > TEL > 6 Inch Heater
简要描述:
| Furnace Vendor | TEL(Tokyo Electron) |
| Heater Model |
TEL UL2604
|
| Max Temperature |
1250℃
|
| Wafer Size | 6 Inch |
| Process |
Well Drive-ln
|
| Process Temp Range |
800℃~1200℃
|