所属分类:光伏炉体
简要描述:
| Furnace Vendor |
|
| Heater Model | —— |
| Max Temperature |
1300℃
|
| Wafer Size |
M0.1.2.4.6.12
|
| Process |
Wet Dry Oxidation
|
| Process Temp Range |
900℃~1250℃
|