所属分类:半导体炉体 > Ultra high Temp > 6 Inch Heater
简要描述:
|
Furnace Vendor |
|
|
Heater Model |
-- |
|
Max Temperature |
1600℃ |
|
Wafer Size |
6 Inch |
|
Process |
Oxidation,Anneal |
|
Process Temp Range |
700℃~1500℃ |