| 6 Inch Heater | |
| 8 Inch Heater | |
| 12Inch Heater |
所属分类:半导体炉体 > TEL > 12Inch Heater
简要描述:
| Furnace Vendor | TEL(Tokyo Electron) |
| Heater Model | VOS-56-101.101P.101PT |
| Max Temperature | 1000℃ |
| Wafer Size | 12 Inch |
| Process | LP-CVD POLY |
| Process Temp Range | 600-1000℃ |
上一篇:VOS-56-003
下一篇:VMM-40-005