| 12Inch Heater | |
| 8 Inch Heater | |
| 6 Inch Heater |
所属分类:半导体炉体 > KE > 8 Inch Heater
简要描述:
| Furnace Vendor | Kokusai |
| Heater Model |
D4EX18104 |
| Max Temperature | 850℃ |
| Wafer Size | 8 Inch |
| Process |
Low temp anneal, H2 sinter
|
| Process Temp Range | 800℃ |