所属分类:光伏炉体
简要描述:
| Furnace Vendor |
|
| Heater Model |
——
|
| Max Temperature |
800℃
|
| Wafer Size |
M0.1.2.4.6.12
|
| Process |
LP-CVD,PECVD
|
| Process Temp Range |
550℃~750℃
|
| Diameter |
~Φ720
|