半导体炉体 > TEL > 8 Inch Heater

半导体炉体
- TEL
  - VMU-28-011
  - VMU-28-014
  - VMU-32-001
  - VMM-28-001
  - VMM-28-007
  - VMM-28-009
  - VMM-28-014
  - VMM-28-101
  - VMM-28-104
  - TEL UL2604
  - VMU-40-003
  - VMU-40-007EX
  - VMU-40-007EX2
  - VMU-40-007EXT-41
  - VMU-40-009
  - VMU-40-102EX2
  - VMM-35-001
  - VMM-40-005
  - VMM-40-101
  - VMM-40-104
  - VOS-40-017
  - VMU-54-001
  - VMM-56-002
  - VMM-56-201
  - VMM-56-302EX
  - VMM-56-304
  - VMM-56-306
  - VOS-56-003
  - VOS-56-101.101P.101PT
- KE
  - D4EX01649
  - D4EX02625
  - D4EX02645
  - D4EX02736
  - D4EX02738
  - D4EX02748
  - D4EX17983
  - D4EX02627
  - D4EX02728
  - D4EX03531
  - D4EX04882
  - D4EX04895
  - D4EX08455-6
  - D4EX08912
  - D4EX15379
  - D4EX17776
  - D4EX18104
  - D4EX19087
  - D4EX19896
  - D4EX16975
  - D4EX22250
  - D4EX24196
  - D4EX20090
  - D4EX24407
  - D4EX27618
  - D4EX24497
  - D4EX27019
  - D4EX34044
  - D4EX34221
- ASM
- TORCH
  - 2105-220649-51
  - Customize A
  - Customize B
  - OTS500
  - OTS1500
  - P11-5
  - P11-7
  - D4EX31563
- Ultra high Temp
光伏炉体
热电偶
- Thermocouple-Profile
- Thermocouple-Spike
其他配件

TEL KE ASM TORCH Ultra high Temp

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TEL(Tokyo Electron)Series

6 Inch Heater	VMU-28-011/ VMU-28-014/ VMU-32-001/ VMM-28-001/ VMM-28-007/ VMM-28-009/ VMM-28-014/ VMM-28-101/ VMM-28-104/ TEL UL2604/
8 Inch Heater	VMU-40-003/ VMU-40-007EX/ VMU-40-007EX2/ VMU-40-007EXT-41/ VMU-40-009/ VMU-40-102EX2/ VMM-35-001/ VMM-40-005/ VMM-40-101/ VMM-40-104/ VOS-40-017/
12Inch Heater	VMU-54-001/ VMM-56-002/ VMM-56-201/ VMM-56-302EX/ VMM-56-304/ VMM-56-306/ VOS-56-003/ VOS-56-101.101P.101PT/

VMM-40-101

所属分类：半导体炉体 > TEL > 8 Inch Heater

简要描述：

Furnace VendorTEL(Tokyo Electron)Heater ModelVMM-40-101Max Temperature900℃Wafer Size8 InchProcessLPCVD-Nitride, POLY,TEOS,PYROProcess Temp Range800℃(Middle Temp)

产品咨询: 服务电话：0519-85583751

产品详情

Furnace Vendor	TEL(Tokyo Electron)
Heater Model	VMM-40-101
Max Temperature	900℃
Wafer Size	8 Inch
Process	LPCVD-Nitride, POLY,TEOS,PYRO
Process Temp Range	800℃(Middle Temp)