12Inch Heater | |
8 Inch Heater | |
6 Inch Heater |
所属分类:半导体炉体 > TEL > 8 Inch Heater
简要描述:
Furnace Vendor | TEL(Tokyo Electron) |
Heater Model | VMM-40-101 |
Max Temperature | 900℃ |
Wafer Size | 8 Inch |
Process | LPCVD-Nitride, POLY,TEOS,PYRO |
Process Temp Range | 800℃(Middle Temp) |
上一篇:VMM-40-005
下一篇:VMM-40-104