| 12Inch Heater | |
| 8 Inch Heater | |
| 6 Inch Heater |
所属分类:半导体炉体 > TEL > 8 Inch Heater
简要描述:
| Furnace Vendor | TEL(Tokyo Electron) |
| Heater Model | VMU-40-007EXT |
| Max Temperature |
1250℃
|
| Wafer Size | 8 Inch |
| Process |
HT-PYRO
|
| Process Temp |
850-1250℃
|
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