所属分类:半导体炉体 > Horizontal Heater Series > BTU Horizontal Heater (High Temp)
简要描述:
| Furnace Vendor | |
| Heater Model | |
| Max Temperature | 1300℃ |
| Wafer Size | M0.1.2.4.6.12 |
| Process | Wet Dry Oxidation |
| Process Temp Range | 900℃~1250℃ |
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