所属分类:半导体炉体 > Horizontal Heater Series > Horizontal Heater (Sperate Temp)
简要描述:
| Furnace Vendor | |
| Heater Model | SPERATE TEMP HTR |
| Max Temperature | L:1200℃.R:850℃ |
| Wafer Size | |
| Process | |
| Process Temp Range | L:1200℃.R:850℃ |
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